Characterization of Zirconium Oxide Thin Films Prepared by Sol - Gel Method

Zirconium Oxide (ZrO2) is an interesting material in optical filters, gas sensors and protective coatings owing to their outstanding optical, chemical, thermal and mechanical properties. Zirconium Oxide thin films were deposited on glass substrates by sol gel dip coating method, using alcoholic solutions. The dipping solution was prepared from Zirconium OxychlorideOctahydrate and Isopropanol with Acetyl acetone. In order to find the influence of the number of layers on the properties of ZrO2 thin films, samples with different number of layers were prepared by repeating the dipping and drying processes. After coating, the sol gel derived films were heated at 500°C, to complete the dehydration of the ZrO2 precursors. Various characterization techniques were used to evaluate the crystalline structure and grain size (XRD), the morphology (SEM), surface bonding properties (FTIR) and luminescence properties (PL) of ZrO2 films. XRD data exhibited that at 500°C temperature nanosized ZrO2 films with tetragonal and monoclinic phases have been formed. FTIR spectra revealed the formation of Zr-O bond. Photoluminescence studies displayed a strong emission peak at 426 nm and relatively weak emission peak at 488 nm.